JPS6457730A - Wafer shifting method - Google Patents

Wafer shifting method

Info

Publication number
JPS6457730A
JPS6457730A JP62214345A JP21434587A JPS6457730A JP S6457730 A JPS6457730 A JP S6457730A JP 62214345 A JP62214345 A JP 62214345A JP 21434587 A JP21434587 A JP 21434587A JP S6457730 A JPS6457730 A JP S6457730A
Authority
JP
Japan
Prior art keywords
wafer
wafers
quartz boat
boat
trenches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62214345A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568102B2 (en]
Inventor
Takanobu Asano
Kenichi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP62214345A priority Critical patent/JPS6457730A/ja
Publication of JPS6457730A publication Critical patent/JPS6457730A/ja
Publication of JPH0568102B2 publication Critical patent/JPH0568102B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62214345A 1987-08-28 1987-08-28 Wafer shifting method Granted JPS6457730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214345A JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214345A JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Publications (2)

Publication Number Publication Date
JPS6457730A true JPS6457730A (en) 1989-03-06
JPH0568102B2 JPH0568102B2 (en]) 1993-09-28

Family

ID=16654225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214345A Granted JPS6457730A (en) 1987-08-28 1987-08-28 Wafer shifting method

Country Status (1)

Country Link
JP (1) JPS6457730A (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6431320B1 (en) * 1995-10-23 2002-08-13 Micron Technology, Inc. Manual wafer lift
US6634847B1 (en) * 1998-11-17 2003-10-21 Mirae Corporation Method and an apparatus for picking up a module IC in a customer tray of a module IC handler
US6769948B1 (en) 1999-01-08 2004-08-03 Nec Lcd Technologies, Ltd. Method of fabricating a display panel and method of relocating a display panel
WO2011148559A1 (ja) * 2010-05-28 2011-12-01 イーティーシステムエンジニアリング株式会社 半導体ウェーハの分離装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6431320B1 (en) * 1995-10-23 2002-08-13 Micron Technology, Inc. Manual wafer lift
US6634847B1 (en) * 1998-11-17 2003-10-21 Mirae Corporation Method and an apparatus for picking up a module IC in a customer tray of a module IC handler
US6769948B1 (en) 1999-01-08 2004-08-03 Nec Lcd Technologies, Ltd. Method of fabricating a display panel and method of relocating a display panel
WO2011148559A1 (ja) * 2010-05-28 2011-12-01 イーティーシステムエンジニアリング株式会社 半導体ウェーハの分離装置
JP2011249640A (ja) * 2010-05-28 2011-12-08 Et System Engineering Co Ltd 半導体ウェーハの分離装置

Also Published As

Publication number Publication date
JPH0568102B2 (en]) 1993-09-28

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